Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With mechanical mask – shield or shutter for shielding workpiece
Reexamination Certificate
2004-12-03
2009-12-22
Lund, Jeffrie R. (Department: 1792)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With mechanical mask, shield or shutter for shielding workpiece
C118S715000, C118S720000, C118S721000, C118S504000, C118S505000, C216S057000
Reexamination Certificate
active
07635418
ABSTRACT:
Apparatus and methods for shielding a feature projecting from a first area on a substrate to a plasma while simultaneously removing extraneous material from a different area on the substrate with the plasma. The apparatus includes at least one concavity positioned and dimensioned to receive the feature such that the feature is shielded from the plasma. The apparatus further includes a window through which the plasma removes the extraneous material. The method generally includes removing the extraneous material while shielding the feature against plasma exposure.
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Condrashoff Robert S.
Getty James D.
Tyler James S.
Chandra Satish
Lund Jeffrie R.
Nordson Corporation
Wood Herron & Evans LLP
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