Method and apparatus for processing nanoscopic structures

Details Method and apparatus for processing nanoscopic structures Method and apparatus for processing nanoscopic structures

2003-03-25

2008-08-26

Olsen, Allan (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With mechanical mask, shield or shutter for shielding workpiece

C427S472000

Reexamination Certificate

active

07416634

ABSTRACT:
The present invention relates to a method and apparatus for growing nanostructures in a controlled way, wherein the controlling comprises controlling the electron emitting tips used for the nanoscopic structure growth. Further, the present invention describes an integrated method and apparatus for growing a plurality of electron emitting tips and nanoscopic structures in the same growing process.

REFERENCES:
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patent: 2002/0122766 (2002-09-01), Lieber et al.
patent: 2003/0170898 (2003-09-01), Gundersen et al.
patent: 2004/0026232 (2004-02-01), Boxman et al.
patent: 2005/0178330 (2005-08-01), Goodwin et al.
patent: 2006/0107506 (2006-05-01), Doffing et al.
patent: 199 35 558 (2001-03-01), None
patent: 01 03178 (2001-01-01), None
patent: 02 103085 (2002-12-01), None

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