Apparatus and method for regional plasma control

Details Apparatus and method for regional plasma control Apparatus and method for regional plasma control

2011-03-01

2011-03-01

Vinh, Lan (Department: 1713)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With mechanical mask, shield or shutter for shielding workpiece

C156S345310, C156S345390, C438S719000

Reexamination Certificate

active

07897008

ABSTRACT:
An apparatus for controlling a plasma etching process includes plasma control structure that can vary a size of a plasma flow passage, vary a speed of plasma flowing through the plasma flow passage, vary plasma concentration flowing through the plasma flow passage, or a combination thereof.

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