Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With mechanical mask – shield or shutter for shielding workpiece
Reexamination Certificate
2005-05-31
2005-05-31
Vinh, Lan (Department: 1765)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With mechanical mask, shield or shutter for shielding workpiece
C438S706000, C438S905000, C134S001200, C134S001300, C156S345350
Reexamination Certificate
active
06899785
ABSTRACT:
Undesirable reactions (such as formation of volatile compounds or complexes) are recognized to occur during production processes (such as etching with fluorine) at interior surfaces of a reactor chamber (such as a silicon-based reactor chamber). These undesirable reactions may be minimized and controlled by priming the chamber surface by incorporating seasoning atoms and/or molecules.
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Dutra Kellie L.
Gibson Margaret L.
Meunier Ronald G.
Silbergleit Jason W.
International Business Machines - Corporation
McGuireWoods LLP
Vinh Lan
Walter Howard J.
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