Chamber configuration for confining a plasma
Chamber configuration for confining a plasma
Configurable plasma volume etch chamber
Confined plasma with adjustable electrode area ratio
Deformation reduction at the main chamber
Dielectric etch chamber with expanded process window
Electrode member used in a plasma treating apparatus
Focus ring and plasma processing apparatus
Forming method and forming system for insulation film
Forming method and forming system for insulation film
Forming system for insulation film
Gas-permeable plasma electrode, method for production of the...
High-frequency plasma processing apparatus
High-frequency plasma processing apparatus
High-speed symmetrical plasma treatment system
Highly heat-resistant plasma etching electrode and dry...
Hollow anode plasma reactor and method
Magnet assembly for plasma containment
Magnetic enhancement for mechanical confinement of plasma
Magnetic neutral line discharge plasma processing system