Magnetic neutral line discharge plasma processing system

Details Magnetic neutral line discharge plasma processing system Magnetic neutral line discharge plasma processing system

2003-06-10

2011-11-01

Alejandro, Luz L. (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

Having glow discharge electrode gas energizing means

C118S7230ER

Reexamination Certificate

active

08048260

ABSTRACT:
The present invention provides a magnetic neutral line discharge plasma processing system that can apply a plurality of linear magnetic neutral line discharge plasmas simultaneously so as to uniformly process all the surface area of a large rectangular substrate for homogeneousness. The management field generating means of the magnetic neutral line discharge plasma processing system has at least two linear current rods arranged outside the vacuum chamber in parallel with the surface to be processed of the object of processing in the vacuum chamber so as to form at least a linear magnetic neutral line in the vacuum chamber between adjacently located linear current rods.

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