Magnet assembly for plasma containment

Magnetic enhancement for mechanical confinement of plasma

Magnetic neutral line discharge plasma processing system

Magnetically enhanced plasma apparatus and method with...

Magnetron plasma processing apparatus

Magnetron plasma processing apparatus

Matching circuit for a complex radio frequency (RF) waveform

Method and apparatus for an improved upper electrode plate...

Method and apparatus for conserving energy within a process...

Method and apparatus for etching a gold metal layer using a...

Method and apparatus for low energy electron enhanced...

Method and apparatus for low energy electron enhanced...

Method and apparatus for plasma processing

Method and apparatus for processing fine particle dust in...

Method and apparatus for providing uniform plasma in a...

Method and apparatus for providing uniform plasma in a...

Method and apparatus for shaping a magnetic field in a...

Method and apparatus for treating wafer edge region with...

Method and apparatus for treating wafer edge region with...

Method and apparatus having pin electrode for surface...