Adjustable segmented electrode apparatus and method

Apparatus and method for fabricating semiconductor device

Apparatus and method for plasma processing high-speed...

Apparatus and method for radio frequency de-coupling and...

Apparatus for aligning electrodes in a process chamber to...

Apparatus for and method of processing an object to be...

Apparatus for automatically cleaning mask

Apparatus for fabricating a semiconductor device

Apparatus for generating a plasma from an electromagnetic...

Apparatus for plasma treatment of golf balls

Apparatus for the removal of a metal oxide from a substrate...

Apparatus for uniformly etching a dielectric layer

Apparatus for uniformly etching a dielectric layer

Apparatus including chuck and matching box

Apparatus to manufacture semiconductor

Apparatus to manufacture semiconductor

Asymmetric grounding of rectangular susceptor

Atmospheric pressure non-thermal plasma device to clean and...

Capacitive coupling plasma processing apparatus

Capacitive coupling plasma processing apparatus and method...