Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate
2005-06-21
2011-12-20
Gramaglia, Maureen (Department: 1716)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
Having glow discharge electrode gas energizing means
C156S345470, C118S7230ER
Reexamination Certificate
active
08080125
ABSTRACT:
A gas-permeable plasma electrode has an electrically conductive container with a base which has a hole, and a gas-permeable porous electrically conductive film, with the gas-permeable porous electrically conductive film being arranged opposite the base in the electrically conductive container and being connected to the electrically conductive container, and with the gas-permeable porous electrically conductive film having at least one layer of electrically conductive grains, at least some of which are arranged so as to form a gas-permeable film.
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Gramaglia Maureen
Infineon - Technologies AG
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