Process for etching patterned substrates

Process for etching polyimide substrate in formation of unsuppor

Process for etching polytetrafluoroethylene

Process for etching recesses in a silicon substrate

Process for etching semiconductor devices

Process for etching semiconductor devices

Process for etching semiconductor devices

Process for etching silicon dioxide layer without micro masking

Process for etching silicon nitride film

Process for etching silicon nitride selectively to silicon oxide

Process for etching SiO.sub.2 layers to silicon in a moderate va

Process for etching SiO.sub.2 utilizing HF vapor and an organic

Process for etching sloped vias in polyimide insulators

Process for etching tapered polyimide vias

Process for etching tapered vias in silicon dioxide

Process for etching titanium at a controllable rate

Process for etching via holes in alumina

Process for etching workpieces

Process for etching zirconium metallic objects

Process for fabricating a self-aligned bipolar transistor