Process for etching patterned substrates

Details Process for etching patterned substrates Process for etching patterned substrates

1990-02-15

1991-06-04

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156639, 156656, 1566591, B44C 122, C23F 102, C03C 1500, C03C 2506

Patent

active

050211200

ABSTRACT:
A wet etching process wherein the etchant bath is ultrasonically vibrated, preferably while a carrier member holding the workpiece to be etched is slightly agitated. An apparatus for practicing the process includes a first vessel for holding a coupling fluid; a second vessel for holding an etchant solution; means for suspending the second vessel in the coupling fluid of the first vessel; and an ultrasonic generator means coupled to the first vessel to impart ultrasonic vibrations to the coupling fluid and, via the coupling fluid and second vessel, to the etchant solution.

REFERENCES:
patent: 3290192 (1966-12-01), Kelley
patent: 3411999 (1968-11-01), Weinberg
patent: 3730799 (1973-05-01), Scannell

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