SF6/nitriding gas/oxidizer plasma etch system

Shadow clamp

Shallow groove capacitor fabrication method

Shaped crystal fiber growth method

Short circuit prevention in the manufacture of semiconductor dev

Sidewall oxide to reduce filaments

Sidewall passivation by oxidation during refractory-metal plasma

Sidewall spacer using an overhang

Silica-based anti-reflective planarizing layer

Silicon backside etch for semiconductors

Silicon cap for annealing gallium arsenide

Silicon carbide membrane for X-ray lithography and method for th

Silicon containing resists

Silicon epitaxial reactor and control method

Silicon etch rate enhancement

Silicon etching process

Silicon etching process

Silicon etching process using polymeric mask, for example, to fo

Silicon implanted and bombarded with phosphorus ions

Silicon manufacture