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Shallow trench isolation on a silicon substrate using...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Shallow trench isolation process

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction
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Shallow trench isolation process particularly suited for...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation process utilizing differential liners

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation structure

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation structure and formation method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation structure for a bipolar transistor

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including high voltage or high power devices isolated from...
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Shallow trench isolation structure for semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation structure with low trench parasitic...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation structures having uniform and...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation type semiconductor device and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Shallow trench isolation using antireflection layer

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
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Shallow trench isolation using antireflection layer

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
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Shallow trench isolation using low dielectric constant...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation using low dielectric constant...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation with oxide-nitride/oxynitride liner

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation with self aligned PSG layer

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation with spacers for improved gate oxide qu

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Shallow trench isolation with thin nitride as gate dielectric

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
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Shallow trench source EPROM cell

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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