Shallow trench isolation on a silicon substrate using...
Shallow trench isolation process
Shallow trench isolation process particularly suited for...
Shallow trench isolation process utilizing differential liners
Shallow trench isolation structure
Shallow trench isolation structure and formation method thereof
Shallow trench isolation structure for a bipolar transistor
Shallow trench isolation structure for semiconductor device
Shallow trench isolation structure with low trench parasitic...
Shallow trench isolation structures having uniform and...
Shallow trench isolation type semiconductor device and...
Shallow trench isolation using antireflection layer
Shallow trench isolation using antireflection layer
Shallow trench isolation using low dielectric constant...
Shallow trench isolation using low dielectric constant...
Shallow trench isolation with oxide-nitride/oxynitride liner
Shallow trench isolation with self aligned PSG layer
Shallow trench isolation with spacers for improved gate oxide qu
Shallow trench isolation with thin nitride as gate dielectric
Shallow trench source EPROM cell