Thin film piezoelectric element, method of manufacturing the...
Thin film voltage-tuned semiconductor bulk acoustic resonator (S
Thin film-structure and a method for producing the same
Three-dimensional analog input control device
Three-dimensional analog input control device
Three-dimensional structure element and method of...
Torsion spring for MEMS structure
Transducer having a resonating silicon beam and method for formi
Transition metal dielectric alloy materials for MEMS
Trench isolated capacitive micromachined ultrasonic...
Trench isolation for micromechanical devices
Trilayered beam MEMS device and related methods
Ultra-sensitive detection techniques
Ultra-thin MO-C film transistor
Ultra-thin piezoelectric resonator
Ultrasonic transducer device
Vacuum sealed RF/microwave microresonator
Vertical transistor comprising a mobile gate and a method...
Wafer level hermetically sealed MEMS device
Wide band cross point switch using MEMS technology