Torsion spring for MEMS structure

Details Torsion spring for MEMS structure Torsion spring for MEMS structure

2005-07-26

2005-07-26

Zarneke, David (Department: 2829)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S415000, C257S482000, C257S682000, C257S680000

Reexamination Certificate

active

06921952

ABSTRACT:
A torsion spring for a MEMS structure has a plurality of beams, each beam having two ends wherein both ends are fixed to a predetermined area, and at least one connection bar disposed at a right angle to a lengthwise direction of the plurality of beams, wherein the at least one connection bar connects the plurality of beams. Preferably, the distance between the connection bars is equal to or greater than the width of one of the plurality of beams. Accordingly, a torsion spring according to the present invention has a bending stiffness greater than a torsional stiffness, which allows easier torsion. Further, a torsion spring according to the present invention may be easily fabricated by etching.

REFERENCES:
patent: 5862003 (1999-01-01), Saif et al.
patent: 6541831 (2003-04-01), Lee et al.
patent: 6668628 (2003-12-01), Hantschel et al.
Muller, “Microgimbal Torsion Beam Design Using Open, Thin-Walled . . . ” J.MEMS, 10(4):550-560, Dec. 2001.

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