Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2006-06-20
2006-06-20
Nelms, David (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C360S294400, C257S254000
Reexamination Certificate
active
07064401
ABSTRACT:
Two piezoelectric thin films each sandwiched between a main electrode layer and an opposite electrode layer are laminated in pairs so as to form a thin film piezoelectric element. An electrode leading area has a region in which the main electrode layer partially projects from the piezoelectric thin film, and another region in which only an insulating layer is formed on a part of the opposite electrode layer. At least one of a first opening formed through the insulating layer in the former region and a second opening formed through the insulating layer in the latter region is provided. A connection wiring for connecting to the opposite electrode layer or the main electrode layer and leading to the surface layer is formed via the opening.
REFERENCES:
patent: 6897503 (2005-05-01), Otani et al.
patent: 2003/0155845 (2003-08-01), Uchiyama et al.
patent: 2003/0223155 (2003-12-01), Uchiyama
patent: 2005/0040454 (2005-02-01), Kita
patent: 6-224483 (1994-08-01), None
patent: 7-30163 (1995-01-01), None
patent: 8-88419 (1996-04-01), None
patent: 8-242023 (1996-09-01), None
patent: 11-142753 (1999-05-01), None
Y. Uematsu, “Switching to super-high TPI and piggy-back actuator”, IDEMA Japan News No. 32, pp. 4-7 (with partial translation).
Uchiyama Hirokazu
Yanagi Terumi
Tran Long
Wenderoth , Lind & Ponack, L.L.P.
LandOfFree
Thin film piezoelectric element, method of manufacturing the... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thin film piezoelectric element, method of manufacturing the..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film piezoelectric element, method of manufacturing the... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3677225