Manufacturing method of a microelectromechanical switch
Materials and methods for forming hybrid organic-inorganic...
Matrix type piezoelectric/electrostrictive device and...
Means of integrating a microphone in a standard integrated...
Means of integrating a microphone in a standard integrated...
Mechanical switch with a curved bilayer
Mechanism to prevent actuation charging in...
MEM switching device
MEM switching device
MEMS analog frequency divider
MEMS and method of manufacturing MEMS
MEMS and method of manufacturing MEMS
MEMS apparatus and method of manufacturing the same
MEMS device and fabrication method thereof
MEMS device and fabrication method thereof
MEMS device having a layer movable at asymmetric rates
MEMS device having a movable electrode
MEMS device having a trilayered beam and related methods
MEMS device having flexures with non-linear restoring force
MEMS device, MEMS device module and acoustic transducer