Sensor apparatus using an electrochemical cell
Sensor assembly and method
Sensor chip having a diode portions and a thin-wall portion
Sensor design and process
Sensor device and fabrication method for the same
Sensor device having a pathway and a sealed cavity
Sensor device having thin membrane and method of...
Sensor devices having a movable structure
Sensor for sensing fingerpaints and method for producing the sen
Sensor having an offset voltage and method of operation
Sensor system
Sensor with at least one micromechanical structure and...
Sensor with diaphragm sensor chip
Sensors for use in high vibrational applications and methods for
Shape memory alloy information storage device
Signal routing in a hermetically sealed MEMS device
Silicon capacitive microphone
Silicon integrated accelerometer
Silicon microphone
Silicon pressure micro-sensing device and the fabrication...