Sensors for use in high vibrational applications and methods for

Details Sensors for use in high vibrational applications and methods for Sensors for use in high vibrational applications and methods for

1997-11-12

1999-09-21

Monin, Jr., Donald L.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257684, 257710, 27351429, 438456, H01L 2720, H01L 2984

Patent

active

059557710

ABSTRACT:
A hermetically sealed sensor device having a glass member defining a mounting surface and base surface, the glass member including one or more pin apertures extending through the glass member from the mounting surface to the base surface. A metallic pin is disposed in each of the pin apertures, each pin having a portion extending above the mounting surface. The sensor device also includes a semiconductor sensor chip including a semiconductor device and a cover hermetically bonded and sealed to a surface of the semiconductor device, the cover protecting the semiconductor device from the external environment. The is chip hermetically bonded and sealed to the mounting surface of glass member. The semiconductor device has one or more contacts disposed on the surface thereof, for making electrical contact thereto, the cover having one or more contact apertures extending therethrough which exposes a portion of the contacts. The portion of each pin extending above the mounting surface is received within the contact apertures and a conductive glass frit mixture disposed in the contact apertures, hermetically seals the contact apertures and provides electrical continuity between the pins and the contacts.

REFERENCES:
patent: 5170237 (1992-12-01), Tsuda et al.
patent: 5336918 (1994-08-01), Ipposhi et al.
patent: 5471086 (1995-11-01), Ipposhi et al.
patent: 5578843 (1996-11-01), Garabedian et al.
patent: 5726480 (1998-03-01), Pister
patent: 5780885 (1998-07-01), Diem et al.

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