Silicon capacitive microphone

Details Silicon capacitive microphone Silicon capacitive microphone

2005-01-25

2005-01-25

Nelms, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C438S053000

Reexamination Certificate

active

06847090

ABSTRACT:
The present invention is directed to a process for the manufacture of a plurality of integrated capacitive transducers. The process comprises the steps of supplying a first substrate of a semiconductor material having first and second faces, supplying a second substrate of a semiconductor material having first and second faces, forming a diaphragm layer on the first face of the first substrate, forming a backplate layer on the first face of the other of the second substrate, forming a support layer on the backplate layer, etching a plurality of supports from the support layer, for each of the capacitive transducers, etching a plurality of vents from the backplate layer, for each of the capacitive transducers, positioning the diaphragm layer of the first substrate adjacent with the support layer of the second substrate, and welding the diaphragm layer and the support layer together, removing at least a portion of the first substrate to expose the diaphragm layer, for each of the capacitive transducers, removing a portion of the second substrate to expose the vents, for each of the capacitive transducers, and, etching a portion of the diaphragm layer, for each of the capacitive transducers.

REFERENCES:
patent: 4825335 (1989-04-01), Wilner
patent: 4910840 (1990-03-01), Sprenkels et al.
patent: 5146435 (1992-09-01), Bernstein
patent: 5178015 (1993-01-01), Loeppert et al.
patent: 5408731 (1995-04-01), Berggvist et al.
patent: 5452268 (1995-09-01), Bernstein
patent: 5490220 (1996-02-01), Loeppert
patent: 5677965 (1997-10-01), Moret et al.
patent: 5870482 (1999-02-01), Loeppert et al.
patent: 6012335 (2000-01-01), Bashir et al.
patent: 0 549 200 (1993-06-01), None
patent: 55001737 (1980-01-01), None
patent: 03001515 (1991-01-01), None
patent: WO-8500495 (1985-01-01), None
European Search Report for Application No. 02250467.4 dated Oct. 1, 2003.

Affiliated with

Also associated with

Rating

Silicon capacitive microphone does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Silicon capacitive microphone, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Silicon capacitive microphone will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3407192