Signal routing in a hermetically sealed MEMS device

Details Signal routing in a hermetically sealed MEMS device Signal routing in a hermetically sealed MEMS device

2005-09-27

2005-09-27

Coleman, W. David (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C438S051000

Reexamination Certificate

active

06949807

ABSTRACT:
A hermetically sealed MEMS device having a micro-machined electromechanical device, a plurality of pillars at spaced-apart positions removed from the micro-machined electromechanical device, and a peripheral seal ring completely surrounding both the micro-machined electromechanical device and the pillars, all patterned in a layer of epitaxial semiconductor silicon. A glass cover is structured to cooperate with the micro-machined electromechanical device and is sealed by the seal ring. A plurality of pass-through windows are formed internal of the cover and communicate between inner and outer surfaces of the cover. Each of the pillars covers one of the windows. A plurality of internal electrical conductors electrically couple the micro-machined electromechanical device with a surface of each of the pillars.

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