Silicon microphone

Details Silicon microphone Silicon microphone

2006-04-04

2006-04-04

Nelms, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C438S053000

Reexamination Certificate

active

07023066

ABSTRACT:
A solid-state transducer is disclosed. The transducer comprises a semi-conductor substrate forming a support structure and having an opening. A thin-film structure forming a diaphragm responsive to fluid-transmitted acoustic pressure is disposed over the opening. The transducer further includes a plurality of semi-conductor supports and tangential arms extending from the diaphragm edge for connecting the periphery of the diaphragm to the supports. The tangential arms permit the diaphragm to rotate relative to the supports to relieve film stress in the diaphragm. The transducer still further includes a plurality of stop bumps disposed between the substrate and the diaphragm. The stop bumps determine the separation of the diaphragm from the substrate when the transducer is biased.

REFERENCES:
patent: 4420790 (1983-12-01), Golke et al.
patent: 4628740 (1986-12-01), Ueda et al.
patent: 4776019 (1988-10-01), Miyatake
patent: 4825335 (1989-04-01), Wilner
patent: 4908805 (1990-03-01), Sprenkels et al.
patent: 4910840 (1990-03-01), Sprenkels et al.
patent: 5146435 (1992-09-01), Bernstein
patent: 5151763 (1992-09-01), Marek et al.
patent: 5178015 (1993-01-01), Loeppert et al.
patent: 5357807 (1994-10-01), Guckel et al.
patent: 5408731 (1995-04-01), Berggvist et al.
patent: 5449909 (1995-09-01), Kaiser et al.
patent: 5452268 (1995-09-01), Bernstein
patent: 5490220 (1996-02-01), Loeppert
patent: 5506919 (1996-04-01), Roberts
patent: 5531787 (1996-07-01), Lesinski et al.
patent: 5740261 (1998-04-01), Loeppert et al.
patent: 5748758 (1998-05-01), Menasco, Jr. et al.
patent: 5831262 (1998-11-01), Greywall et al.
patent: 5870482 (1999-02-01), Loeppert et al.
patent: 5939968 (1999-08-01), Nguyen et al.
patent: 6012335 (2000-01-01), Bashir et al.
patent: 6078245 (2000-06-01), Fritz et al.
patent: 6108184 (2000-08-01), Minervini et al.
patent: 6191928 (2001-02-01), Rector et al.
patent: 6262513 (2001-07-01), Furukawa et al.
patent: 6282072 (2001-08-01), Minervini et al.
patent: 2001/0029650 (2001-10-01), Takata et al.
patent: 2002/0067663 (2002-06-01), Loeppert et al.
patent: WO 02/15636 (2002-02-01), None

Affiliated with

Also associated with

Rating

Silicon microphone does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Silicon microphone, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Silicon microphone will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3547392