Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent
1993-10-25
1994-12-13
Wojciechowicz, Edward
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
257417, 257418, 257419, 257754, 257756, 257618, 437190, 437197, 437228, 437233, 437901, H01L 2904, H01L 2144
Patent
active
053731816
ABSTRACT:
A grid-like arrangement of membranes of doped polysilicon are mounted on a substrate but are electrically insulated therefrom each membrane extends over a cavity and is joined to the substrate at at least two supporting locations so that they cavity lies between the membrane and the substrate. Changes in an electrical quantity existing between the membranes and the substrate are measured as forces exerted on the grid-like arrangement of sensor elements so that the ridges in the skin on a finger tip may be sensed for detecting a fingerprint.
REFERENCES:
patent: 3440873 (1969-04-01), Eichelberger
patent: 4203128 (1980-05-01), Guckel et al.
Biebl Markus
Klose Helmut
Scheiter Thomas
Siemens Aktiengesellschaft
Wojciechowicz Edward
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