Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2007-05-01
2007-05-01
Zarneke, David A. (Department: 2891)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C073S861420, C073S204260
Reexamination Certificate
active
10914263
ABSTRACT:
A sensor device for use in an automobile as an airflow sensor is composed of a silicon substrate in which a cavity is formed and a base plate bonded to the silicon substrate. An upper end of the cavity is closed with a thin membrane including a sensor element such as a temperature sensor element, while a lower end of the cavity is closed with the base plate. An air passage having a small cross-section is formed through the base plate, so that the cavity communicates with the outside air through the air passage. The thin membrane is prevented from being damaged by collision with foreign particles included in the airflow because the air in the cavity functions as a damper. The air passage may be made in the silicon substrate in parallel to its surface without using the base plate.
REFERENCES:
patent: 3748571 (1973-07-01), Kurtz
patent: 4784721 (1988-11-01), Holmen et al.
patent: 4975390 (1990-12-01), Fujii et al.
patent: 5056362 (1991-10-01), Ang et al.
patent: 5116331 (1992-05-01), Chapman
patent: 5283459 (1994-02-01), Hirano et al.
patent: 5344523 (1994-09-01), Fung et al.
patent: 5589810 (1996-12-01), Fung
patent: 5629538 (1997-05-01), Lipphardt et al.
patent: 5632854 (1997-05-01), Mirza et al.
patent: 5719069 (1998-02-01), Sparks
patent: 5852320 (1998-12-01), Ichihashi
patent: 6066882 (2000-05-01), Kato
patent: 6150681 (2000-11-01), Allen
patent: 6184773 (2001-02-01), Bonne et al.
patent: 6278167 (2001-08-01), Bever et al.
patent: 6365055 (2002-04-01), Weber et al.
patent: 6388279 (2002-05-01), Sakai et al.
patent: 6432737 (2002-08-01), Webster
patent: 6441503 (2002-08-01), Webster
patent: 6551853 (2003-04-01), Toyoda
patent: 6649988 (2003-11-01), Toyoda et al.
patent: 6681623 (2004-01-01), Bonne et al.
patent: 6698282 (2004-03-01), Yasukawa et al.
patent: 6762672 (2004-07-01), Taguchi et al.
patent: 6789430 (2004-09-01), Yoneda et al.
patent: 6848320 (2005-02-01), Miyajima et al.
patent: 6870086 (2005-03-01), Hamamoto et al.
patent: 6911894 (2005-06-01), Bonne et al.
patent: 7095064 (2006-08-01), Hamamoto
patent: A-10-185641 (1998-07-01), None
patent: A-10-221142 (1998-08-01), None
patent: A-2001-50787 (2001-02-01), None
patent: A-2001-194201 (2001-07-01), None
patent: A-2002-243517 (2002-08-01), None
patent: A-2003-130702 (2003-05-01), None
yourdictionary.com printout of the definition of both “membrane” and “diaphragm”.
Denso Corporation
Posz Law Group , PLC
Zarneke David A.
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