Batch fabricated semiconductor micro-switch
Batch fabricated semiconductor thin-film pressure sensor and...
Batch processed multi-lead vacuum packaging for integrated senso
Bi-directional released-beam sensor
Bonded wafer package module
Buckling beam bi-stable microelectromechanical switch using...
Cantilevered microstructure
Capacitative micro-sensor with a low stray capacity and manufact
Capacitive dynamic quantity sensor
Capacitive dynamic quantity sensor and semiconductor device
Capacitive micro-electro-mechanical switch and method of...
Capacitive micromachined ultrasonic transducer(CMUT) with...
Capacitive micromachined ultrasound transducer fabricated...
Capacitive type microelectromechanical RF switch
Carbon nanotube-based electronic switch
Carrier structure for semiconductor transducers
Carrier structure for transducers
Chip assembly including package element and integrated...
Chip-scaled MEMS microphone package
CMOS integrated microsensor with a precision measurement circuit