Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent
1997-03-24
1998-10-13
Whitehead, Jr., Carl W.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
257421, 257423, 257426, 257427, H01L 2982, H01L 4300
Patent
active
058215964
ABSTRACT:
A micro-switch having a flexible conductive membrane which is moved by an external force, such as pressure from an air flow, to establish a connection between contact pads. The conductive membrane is stretched over one or more spacer pads to introduce deformation in the conductive membrane, thereby improving the accuracy and repeatability of the micro-switch. The spacing between the contact pads and the conductive membrane is precisely controlled by controlling the height difference between the spacer pads and the conductive pads. This height difference is determined by one or more precisely controlled etch operations.
REFERENCES:
patent: 5643816 (1997-07-01), Hsu et al.
Clymer James R. W.
Endter Paul A.
Hsu Tseng-Yang
Miu Denny K.
Tang Weilong
Integrated Micromachines, Inc.
Klivans Norman R.
Whitehead Jr. Carl W.
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