Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2007-11-13
2007-11-13
Pert, Evan (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S254000, C257S595000, C257S600000, C257S602000, C257S700000
Reexamination Certificate
active
11099163
ABSTRACT:
A capacitive dynamic quantity sensor whose size is small and whose reliability and mass productivity are high is provided. In order to realize signal transmission from a lower electrode to an upper electrode, silicon columns which are electrically isolated from one another but not mechanically isolated from one another are formed to connect both electrodes.
REFERENCES:
patent: 5296730 (1994-03-01), Takano et al.
patent: 6215318 (2001-04-01), Schoefthaler et al.
Kato Kenji
Sudou Minoru
Yarita Mitsuo
Adams & Wilks
Pert Evan
Seiko Instruments Inc.
Tran Tan
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