Capacitative micro-sensor with a low stray capacity and manufact

Details Capacitative micro-sensor with a low stray capacity and manufact Capacitative micro-sensor with a low stray capacity and manufact

1993-02-19

1994-10-04

Crane, Sara W.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257535, 73517AV, H01L 2984, H01L 2996

Patent

active

053529189

ABSTRACT:
A capacitive micro-sensor includes a sandwich of three silicon plates, each surface of the frame region of the central plate being assembled to the opposing surface of each external plate through a thin layer forming an insulating stripe. At least one of the external plates forms a first electrode, and at least one central portion of the central plate forms a variable capacity with at least one of the external plates. The frame region of the central plate is electrically disconnected from the central portion. First contact means are coupled to the frame portion. Second contact means are coupled to the central portion and form a second electrode of the variable capacity.

REFERENCES:
patent: 4930042 (1990-11-01), Wiegand et al.

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