Microstructures comprising a dielectric layer and a thin...
Microvalve of multilayer silicon construction
Miniature electrostatic actuation device and installation...
Minute structure, micromachine, organic transistor, electric...
Modules integrating MEMS devices with pre-processed...
Moisture resistant differential pressure sensors
Moisture resistant pressure sensors
Monolithic fully-integrated vacuum sealed BiCMOS pressure...
Monolithic micromechanical vibrating string accelerometer with t
Monolithic sensor of fingerprints
MOS transistor with a deformable gate
Movable micro-electromechanical device
Multi-axis acceleration sensor and manufacturing method thereof
Multi-die apparatus including moveable portions
Multi-level semiconductor structures having environmentally isol
Multi-terminal electromechanical nanocsopic switching device...
Multibit electro-mechanical memory device having at least...
Nanoelectromechanical bistable cantilever device
Nanotube and graphene semiconductor structures with varying...
Nanotube relay device