Monolithic sensor of fingerprints

Details Monolithic sensor of fingerprints Monolithic sensor of fingerprints

1996-10-10

1998-12-01

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257415, 257418, 257108, 438 53, H01L 2982

Patent

active

058442871

ABSTRACT:
An electronic fingerprint sensor works by the detection of pressure, the ridge lines of the finger exerting a greater pressure than the valleys. The sensor has a matrix of pressure microsensors and electronic control and signal-processing circuits. It is made in an entirely monolithic form, according to techniques for the making of electronic circuits (deposition of thin layers, photo-etching, doping and thermal processing), both for the pressure detection part and for the signal-processing and control part. The matrix-type pressure sensor uses either piezoelectric resistors lying on an insulator layer stretched above a cavity or a variable capacitor or a microcontactor.

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patent: 5438875 (1995-08-01), Fung et al.
patent: 5471086 (1995-11-01), Ipposhi et al.
patent: 5637905 (1997-06-01), Carr et al.

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