Microvalve of multilayer silicon construction

Details Microvalve of multilayer silicon construction Microvalve of multilayer silicon construction

1991-09-19

1993-06-01

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257619, 25112917, H01L 2966, H01L 2984, H01L 2996, F16K 3102

Patent

active

052162737

ABSTRACT:
A microwave is made of a stack of layers. A sculptured silicon substrate is held between two covers each consisting of one or more layers. The inlet and the outlet of the microvalve are formed by perforations in the respective covers. A central valve plate is sculptured out of the silicon substrate with surfaces respectively facing the two covers in the region of the inlet and outlet in a symmetrical fashion. The valve plate is connected to the outer frame portion of the silicon substrate by one or more silicon strips. The valve plate is also shaped as a closure member near the inlet and/or the outlet. Electrodes are provided on the covers opposite the valve plate so that the valve can be electrostatically actuated with the valve plate serving as counterelectrode for these electrodes on the covers.

REFERENCES:
patent: 4581624 (1986-04-01), O'Connor
patent: 4821999 (1989-04-01), Ohtaka
patent: 4824073 (1989-04-01), Zdeblick
patent: 4826131 (1989-05-01), Mikkor
patent: 4908693 (1990-03-01), Nishiguchi
patent: 5065978 (1991-11-01), Albarda et al.

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