Micromachined structure with a deformable membrane and...
Micromechanical and microoptomechanical structures with...
Micromechanical cap structure and a corresponding production...
Micromechanical cap structure and the respective...
Micromechanical capacitive transducer and method for...
Micromechanical component
Micromechanical component and corresponding method for its...
Micromechanical component and method for producing a...
Micromechanical component and process for the fabrication thereo
Micromechanical component as well as a method for producing...
Micromechanical component having a diaphragm
Micromechanical component having thin-layer encapsulation...
Micromechanical component including function components...
Micromechanical component with a dielectric movable structure, a
Micromechanical component with a switch element as a movable str
Micromechanical component with sealed membrane openings and...
Micromechanical component, method for fabrication and use
Micromechanical device
Micromechanical device and method of manufacture thereof
Micromechanical device and method of manufacture thereof