Micromechanical capacitive transducer and method for...

Details Micromechanical capacitive transducer and method for... Micromechanical capacitive transducer and method for...

2006-10-23

2008-03-25

Lee, Calvin (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C438S053000

Reexamination Certificate

active

07348646

ABSTRACT:
A micromechanical capacitive converter and a method for manufacturing a micromechanical converter comprise a movable membrane and an electrically conductive face element in a carrier layer. The electrically conductive face element is arranged opposite the membrane above a cavity. The electrically conductive face element and the carrier layer are perforated by perforation openings. The opening width of the perforation openings corresponds approximately to the thickness of the carrier layer.

REFERENCES:
patent: 6535460 (2003-03-01), Loeppert et al.
patent: 6847090 (2005-01-01), Loeppert

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