Micro-electro-mechanical device and method of manufacturing...
Micro-electro-mechanical system (MEMS) variable capacitor...
Micro-electromechanical actuator and methods of use
Micro-electromechanical arrangement
Micro-electromechanical system microphone structure
Micro-electromechanical varactor with enhanced tuning range
Micro-machined absolute pressure sensor
Micro-machined coupled capacitor devices
Micro-machined electromechanical sensors (MEMS) devices
Micro-machined electromechanical system (MEMS) accelerometer...
Micro-mechanical actuator including auxiliary lever to...
Micro-mechanical structure and method for manufacturing the...
Microbellows actuator
Microcomponent comprising a hermetically-sealed cavity and a...
Microdevice with ferroelectric for sensing or applying a force
Microelectromechanical apparatus and method for producing...
Microelectromechanical component
Microelectromechanical component and method for the...
Microelectromechanical device
Microelectromechanical device including an encapsulation...