Micro-electro-mechanical device and method of manufacturing...

Details Micro-electro-mechanical device and method of manufacturing... Micro-electro-mechanical device and method of manufacturing...

2011-01-18

2011-01-18

Soward, Ida M (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S417000, C257S418000, C257S419000, C257S420000, C257SE29324, C977S724000, C977S732000, C977S733000

Reexamination Certificate

active

07872320

ABSTRACT:
The present invention improves mechanical strength of a micro-electro-mechanical device (MEMS) having a movable portion to improve reliability. In a micro-electro-mechanical device (MEMS) having a movable portion, a portion which has been a hollow portion in the case of a conventional structure is filled with a filler material. As the filler material, a block copolymer that is highly flexible is used, for example. By filling the hollow portion, mechanical strength improves. Besides, warpage of an upper portion of a structure body in the manufacture process is prevented, whereby yield improves. A micro-electro-mechanical device thus manufactured is highly reliable.

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