Micro-electro-mechanical system (MEMS) variable capacitor...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation

Reexamination Certificate

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C257S414000, C310S311000

Reexamination Certificate

active

10736283

ABSTRACT:
Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided.

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