Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent
1998-09-10
2000-03-21
Saadat, Mahshid
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
257414, 438 50, 438 52, H01L 2714, H01L 2982, H01L 2984
Patent
active
060406119
ABSTRACT:
A microelectromechanical (MEM) device includes a substrate and a flexible cantilever beam. The substrate has positioned thereon a first interconnection line separated by a first gap and a second interconnection line separated by a second gap parallel to the first interconnection line. The substrate also has positioned thereon a first and second primary control electrode wherein one of the first and second primary control electrodes is positioned on one side of one of the first and second interconnection lines and the other one is positioned on the other side of the other first and second interconnection lines. The flexible cantilever beam has a top surface and a bottom surface and a beam width slightly larger than the gap widths at the gaps. A flexible anchor is secured to the bottom surface of the beam at a center of the beam and attached to a center of the substrate so as to position the beam orthogonally to the first and second interconnection lines. Secondary control electrodes are secured to the bottom surface of the beam and positioned opposite the primary control electrodes. First and second contact pads are secured to the bottom surface of the beam and positioned opposite the first and second interconnection lines.
REFERENCES:
patent: 5619061 (1997-04-01), Goldsmith et al.
patent: 5659195 (1997-08-01), Kaiser et al.
patent: 5665997 (1997-09-01), Weaver et al.
patent: 5673139 (1997-09-01), Johnson
patent: 5818093 (1998-10-01), Gutteridge et al.
Caigoy Arturo L.
De Los Santos Hector J.
Ditmars Eric D.
Kao Yu-Hua
Grunebach Georgann S.
Gudmestad Terje
Hughes Electonics Corporation
Saadat Mahshid
Sales Michael W.
LandOfFree
Microelectromechanical device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microelectromechanical device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectromechanical device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-732599