Microbellows actuator

Details Microbellows actuator Microbellows actuator

1998-04-08

2000-05-30

Saadat, Mahshid

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

73724, 257415, 438 50, 438 53, H01L 2982

Patent

active

060693924

ABSTRACT:
A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.

REFERENCES:
patent: 4399424 (1983-08-01), Rigby
patent: 5177579 (1993-01-01), Jerman
patent: 5178015 (1993-01-01), Leoppert et al.
patent: 5622633 (1997-04-01), Ohtsuka et al.
patent: 5627396 (1997-05-01), James et al.
patent: 5804462 (1998-09-01), Liu et al.

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