Micro-machined coupled capacitor devices

Details Micro-machined coupled capacitor devices Micro-machined coupled capacitor devices

2005-02-08

2005-02-08

Nelms, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C362S259000, C362S285000, C362S286000, C362S287000, C362S418000, C362S427000

Reexamination Certificate

active

06853041

ABSTRACT:
The present invention provides an apparatus and method for a new class of micro-machined electromechanical devices that make use of vibrating membranes. The electromechanical devices include two or more electrodes which are positioned with a membrane. A gap exists between the membrane and each electrode which may vary for each electrode. In general, one electrode is used as an input electrode which receives an electrical signal that causes vibration of the membrane. The vibration of the membrane is then coupled to a receiving or an output electrode. A DC bias voltage is applied to the electrodes to set or modify a width of a gap in the electromechanical device. The electromechanical device could be designed as a transformer, a capacitor, a resonator or a filter. In addition, the device includes a control voltage to dynamically change the coupling between the input electrode and the output electrode(s).

REFERENCES:
patent: 6257739 (2001-07-01), Sun et al.

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