Micro-machined electromechanical system (MEMS) accelerometer...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation

Reexamination Certificate

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C073S514290

Reexamination Certificate

active

06897538

ABSTRACT:
An apparatus and method for suspending a movable structure form a support structure wherein first and second flat and thin arcuately shaped flexures are formed having spaced apart substantially planar and parallel opposing surfaces, each of the first and second flexures being structured for connection between a support structure and a movable structure to be suspended from the support structure and being aligned along a common axis of rotation between the support structure and the movable structure.

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Abstract, Patent Abstracts of Japan, Publication No. 10104263, Publication Date: Apr. 24, 1998; 08279995—Oct. 1, 1996, Kiritani Norihiko, Semiconductor Acceleration Sensor and Manufacture thereof.

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