Micromechanical component, method for fabrication and use
Micromechanical device
Micromechanical device and method of manufacture thereof
Micromechanical device and method of manufacture thereof
Micromechanical device and method of manufacturing...
Micromechanical device with an epitaxial layer
Micromechanical device with microfluidic lubricant channel
Micromechanical diaphragm
Micromechanical electronic device
Micromechanical enclosure
Micromechanical pipetting device
Micromechanical semiconductor component and manufacturing method
Micromechanical semiconductor sensor
Micromechanical sensor device
Micromechanical sensor for AFM/STM profilometry
Micromechanical sensors and methods of manufacturing same
Micromechanical structure for receiving and/or generating...
Microrelays and microrelay fabrication and operating methods
Microrelays and microrelay fabrication and operating methods
Microstructure and its fabrication method