Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent
1996-03-15
1998-06-02
Saadat, Mahshid D.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
7351432, 7351438, 438 52, H01L 2984
Patent
active
057604550
ABSTRACT:
A component having a movable micromechanical function element arranged in a cavity having a cover layer supported by webs or pillar-like supports is provided. The movable element is potentially covered with a termination layer for closing the etching holes present in the cover layer. Electrical terminals of the movable part, the cover layer and doped regions produced in the substrate as a cooperating electrode enable the realization of an acceleration sensor that is easy to mount in a housing.
REFERENCES:
patent: 5164328 (1992-11-01), Dunn et al.
patent: 5243861 (1993-09-01), Kloeck et al.
patent: 5258097 (1993-11-01), Mastrangelo
patent: 5324683 (1994-06-01), Fitch et al.
B. Puers, et al., "Extremely Miniturized Capacitive Movement Sensors using New Suspension Systems," 8253a Sensors and Actuators--A Physical, A41 (1994) Apr. 1, Nos. 1/3, Lausanne CH, pp. 129-135.
W. Kuehnel et al., "A Surface Micromachined Silicon Acclerometer with On-Chip Detection Circuitry", 8253a Sensors and Actuators--A Phsyical, A45 (1994) Oct., No. 1, Lausanne, CH, pp. 7-16.
B. Puers et al., "Extremely Miniaturized Capacitive Movement Sensors Using New Suspension Systems", 8253a Sensors and Actuators--A Physical, A41 (1994) Apr. 1, Nos. 1/3, Lausanne, CH, pp. 129-135.
Japanese abstract, vol. 94, No. 010, JP-A-06 283528, Oct. 7, 1994.
Biebl Markus
Hierold Christofer
Klose Helmut
Scheiter Thomas
Guay John
Saadat Mahshid D.
Siemens Aktiengesellschaft
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