Micromechanical sensor for AFM/STM profilometry

Details Micromechanical sensor for AFM/STM profilometry Micromechanical sensor for AFM/STM profilometry

1997-06-13

2000-07-18

Crane, Sara

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

73105, 250306, 250307, G01H 2300

Patent

active

060911247

ABSTRACT:
The invention pertains to a micromechanical sensor for AFM/STM profilometry which consists of a beam with a point for interaction with a test surface to be sampled on one end and a fixing block on the other end. The point consists of a basically conical shank with a countersunk point at the end of the shank. The micromechanical sensor has excellent mechanical rigidity and is particularly suited to the measurement of extremely deep and narrow structures with positive side flank angles.

REFERENCES:
patent: 5166520 (1992-11-01), Prater et al.
patent: 5345816 (1994-09-01), Clabes et al.
patent: 5347854 (1994-09-01), Martin et al.
patent: 5382795 (1995-01-01), Bayer et al.
patent: 5393647 (1995-02-01), Neukermans et al.
patent: 5611942 (1997-03-01), Mitsui et al.
patent: 5665905 (1997-09-01), Bartha et al.

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