Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2006-06-13
2006-06-13
Richards, N. Drew (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S431000
Reexamination Certificate
active
07061063
ABSTRACT:
A microstructure includes a support substrate, a movable plate, and an elastic support portion having a first section with at least one concave portion and second sections having no concave portion. The second sections are arranged at both longitudinal ends of the first section and connect with the movable plate and the support substrate, respectively. The movable plate is supported by the elastic support portion so that the movable plate can be freely torsion-vibrated to the support substrate about a torsion axis.
REFERENCES:
patent: 5177579 (1993-01-01), Jerman
patent: 5231879 (1993-08-01), Yamamoto
patent: 5982521 (1999-11-01), Bessho et al.
patent: 6051866 (2000-04-01), Shaw et al.
patent: 6632698 (2003-10-01), Ives
patent: 6774445 (2004-08-01), Mutoh et al.
patent: 6863832 (2005-03-01), Wiemer et al.
patent: 41 26 100 (1993-02-01), None
patent: 9-230275 (1997-09-01), None
patent: WO 01/07869 (2001-02-01), None
L. Muller, et al., “Mechanical Performance of Integrated Microgimbal/Microactuator for Disk Drives”, Transducers ′99, The 10 International Conference on Solid-State Sensors and Actuators, pp. 1002-1005 (Jun. 7-10, 1999).
Kato Takahisa
Torashima Kazutoshi
LandOfFree
Microstructure and its fabrication method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microstructure and its fabrication method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microstructure and its fabrication method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3679461