Micromechanical structure for receiving and/or generating...

Details Micromechanical structure for receiving and/or generating... Micromechanical structure for receiving and/or generating...

2011-03-08

2011-03-08

Dickey, Thomas L (Department: 2893)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257SE27114, C361S181000

Reexamination Certificate

active

07902615

ABSTRACT:
A micromechanical structure and a method for producing a micromechanical structure are provided, the micromechanical structure being configured for receiving and/or generating acoustic signals in a medium at least partially surrounding the structure. The structure includes a first counterelement that has first openings and essentially forms a first side of the structure, a second counterelement that has second openings and essentially forms a second side of the structure, and an essentially closed diaphragm disposed between the first counterelement and the second counterelement.

REFERENCES:
patent: 5146435 (1992-09-01), Bernstein
patent: 5452268 (1995-09-01), Bernstein
patent: 2002/0151100 (2002-10-01), Coffa et al.
patent: 2003/0133588 (2003-07-01), Pedersen
patent: 0 331 992 (1989-09-01), None

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