Micromechanical sensors and methods of manufacturing same

Details Micromechanical sensors and methods of manufacturing same Micromechanical sensors and methods of manufacturing same

2007-03-13

2007-03-13

Tsai, H. Jey (Department: 2812)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S416000, C257S419000, C257SE29003, C257S324000

Reexamination Certificate

active

10866582

ABSTRACT:
A micromechanical sensor and, in particular, a silicon microphone, includes a movable membrane and a counter element in which perforation openings are formed, opposite to the movable membrane via a cavity. The perforation openings are formed by slots, the width of which maximally corresponds to double the spacing defined by the cavity between the membrane and the counter element.

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