Mechanism to prevent actuation charging in...

Details Mechanism to prevent actuation charging in... Mechanism to prevent actuation charging in...

2007-05-08

2007-05-08

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S419000, C257S420000, C257S618000, C257S619000

Reexamination Certificate

active

10955153

ABSTRACT:
According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a top movable electrode, and an actutaion electrode with an undoped polysilicon stopper region to contact the top movable electrode when an actuation current is applied. The undoped polysilicon stopper region prevents actuation charging that accumulates over time in a unipolar actuation condition.

REFERENCES:
patent: 2002/0135440 (2002-09-01), Ryhanen et al.
U.S. Appl. No. 10/812,900, filed Mar. 31, 2004, Chou et al.

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