Variable grain size in conductors for semiconductor vias and...
Vertical current flow semiconductor device utilizing wafer bondi
Very low dielectric constant plasma-enhanced CVD films
Very low effective dielectric constant interconnect...
Via barrier layers continuous with metal line barrier layers...
Via formation in integrated circuit interconnects
Via gouged interconnect structure and method of fabricating...
Via structure for semiconductor chip
Via structure in an integrated circuit utilizing a high...
Via-sea layout integrated circuits
Vias and contact plugs with an aspect ratio lower than the aspec
Vias having varying diameters and fills for use with a...
Void eliminating seed layer and conductor core integrated...
Voidless metallization on titanium aluminide in an interconnect