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X-ray mask, and exposure method and apparatus using the same

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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X-ray mask, and exposure method and apparatus using the same

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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X-ray mask, method for fabricating the same, and pattern formati

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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X-ray mask, method of manufacturing the same, and exposure metho

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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X-ray mask, method of manufacturing the same, and X-ray...

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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X-ray masks, their fabrication and use

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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X-ray means for determining the location of malignant...

X-ray or gamma ray systems or devices – Specific application – Absorption
Reexamination Certificate

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X-ray measurement of resin distribution in a cellulosic...

X-ray or gamma ray systems or devices – Specific application – Fluorescence
Reexamination Certificate

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X-ray measuring apparatus

X-ray or gamma ray systems or devices – Specific application – Computerized tomography
Reexamination Certificate

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X-ray metrology and alignment detection system

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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X-ray metrology using a transmissive x-ray optical element

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
Reexamination Certificate

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X-ray micro diffractometer sample positioner

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
Patent

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X-ray micro-tomography system optimized for high resolution,...

X-ray or gamma ray systems or devices – Specific application – Tomography
Reexamination Certificate

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X-ray microanalyzer for thin films

X-ray or gamma ray systems or devices – Specific application – Fluorescence
Reexamination Certificate

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X-ray microbalance

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
Patent

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X-ray microbeam generating method and device for the same

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
Patent

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X-ray microfluorescence analyzer

X-ray or gamma ray systems or devices – Specific application – Fluorescence
Patent

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X-ray microscope

X-ray or gamma ray systems or devices – Specific application – Telescope or microscope
Patent

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X-ray microscope

X-ray or gamma ray systems or devices – Specific application – Telescope or microscope
Patent

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X-ray microscope

X-ray or gamma ray systems or devices – Specific application – Telescope or microscope
Patent

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