X-ray metrology using a transmissive x-ray optical element

Details X-ray metrology using a transmissive x-ray optical element X-ray metrology using a transmissive x-ray optical element

2006-07-04

2006-07-04

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

C378S085000, C378S145000

Reexamination Certificate

active

07072442

ABSTRACT:
An x-ray metrology system includes one or more transmissive x-ray optical elements, such as zone plates or compound refractive x-ray lenses, to shape the x-ray beams used in the measurement operations. Each transmissive x-ray optical element can focus or collimate a source x-ray beam onto a test sample. Another transmissive x-ray optical element can be used to focus reflected or scattered x-rays onto a detector to enhance the resolving capabilities of the system. The compact geometry of transmissive x-ray optical element allows for more flexible placement and positioning than would be feasible with conventional curved crystal reflectors. For example, multiple x-ray beams can be focused onto a test sample using a transmissive x-ray optical element array. Robust zone plates can be efficiently produced using a damascene process.

REFERENCES:
patent: 5071207 (1991-12-01), Ceglio et al.
patent: 5222113 (1993-06-01), Thieme et al.
patent: 5315113 (1994-05-01), Larson et al.
patent: 5594773 (1997-01-01), Tomie
patent: 5619548 (1997-04-01), Koppel
patent: 5834767 (1998-11-01), Hasegawa et al.
patent: 5914998 (1999-06-01), Izumi
patent: 6167112 (2000-12-01), Schneider
patent: 6226349 (2001-05-01), Schuster et al.
patent: 6327335 (2001-12-01), Carroll
patent: 6381303 (2002-04-01), Vu et al.
patent: 6556652 (2003-04-01), Mazor et al.
Publication entitled: “A Compound Refractive Lens For Focusing High-Energy X-Rays”, Snigirev et al.; Nature; vol. 384; Nov. 7, 1996; pp. 49-51.
Publication entitled: “Focusing High-Energy X-Rays By Compound Refractive Lenses”, Snigirev et al.; Applied Optics; vol. 37; No. 4; Feb. 1, 1998; pp. 653-662.
Publication entitled: “Design And Fabrication Of Fresnel Zone Plates With Large Numbers Of Zones”, Chen et al.; 1997 American Vacuum Society; J. Vac. Sci. Technol. B 15(6), Nov./Dec. 1997; pp. 2522-2527.
Publication entitled: “X-Ray Multilevel Zone Plate Fabrication By Means Of Electron-Beam Lithography: Toward High-Efficiency Performances”, Di Fabrizio et al.; 1999 American Vacuum Society; J. Vac. Sci. Technol. B 17(6), Nov./Dec. 1999; pp. 3439-3443.
Publication entitled: “Phase Zone Plates For X-Rays And The Extreme UV”, Janos Kirz; Journal Of The Optical Society of America; vol. 64; No. 3; Mar. 1974; pp. 301-309.

Affiliated with

Also associated with

Rating

X-ray metrology using a transmissive x-ray optical element does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with X-ray metrology using a transmissive x-ray optical element, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and X-ray metrology using a transmissive x-ray optical element will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3609394